Characterization of stress in semiconductor wafers using birefringence measurements E. M. Gamarts, P. A. Dobromyslov, V. A. Krylov, S. V. Prisenko, E. A. Jakushenko et V. I. SafarovJ. Phys. III France, 3 5 (1993) 1033-1049DOI: https://doi.org/10.1051/jp3:1993180
