Laser plasma sources for soft X-ray projection lithography
F. Bijkerk, L. Shmaenok, A. van Honk, R. Bastiaensen, Yu. Ya. Platonov, A. P. Shevelko, A. V. Mitrofanov, F. Voß, R. Désor, H. Frowein et B. Nikolaus
J. Phys. III France, 4 9 (1994) 1669-1677
DOI: https://doi.org/10.1051/jp3:1994232
