Laser Beam Lithography for Direct Patterning of Interconnections on Prediffused ASIC'sA. Fleury, E. Saint-Christophe, H. Frémont, M. Fathi, G. N'Kaoua et Y. DantoJ. Phys. III France, 5 9 (1995) 1455-1467DOI: https://doi.org/10.1051/jp3:1995203
