Spectroellipsometric Investigation of LPCVD Polysilicon: As Deposited and After HydrogenationC. Flueraru, M. Gartner, D. Dascalu et C. RotaruJ. Phys. III France, 6 2 (1996) 225-235DOI: https://doi.org/10.1051/jp3:1996120
