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Laser plasma sources for soft X-ray projection lithography

F. Bijkerk, L. Shmaenok, A. van Honk, R. Bastiaensen, Yu. Ya. Platonov, A. P. Shevelko, A. V. Mitrofanov, F. Voß, R. Désor, H. Frowein and B. Nikolaus
J. Phys. III France, 4 9 (1994) 1669-1677
DOI: 10.1051/jp3:1994232

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