Journal de Physique III

Detection and Characterization of Precipitates in Annealed Cz Silicon Wafers

Caroline Veve, Nathalie Gay, Michäel Stemmer and Santo Martinuzzi

J. Phys. III France, 5 9 (1995) 1353-1363

DOI: 10.1051/jp3:1995195

Caroline Veve

Nathalie Gay

Michäel Stemmer

Santo Martinuzzi

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