Articles citing this article

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Cited article:

Reflection of keV-energy electrons from multilayer surfaces

V. P. Afanas’ev, A. V. Lubenchenko, S. D. Fedorovich and A. B. Pavolotskii
Technical Physics 47 (11) 1444 (2002)
https://doi.org/10.1134/1.1522115

Experimental determination of angular‐energy distributions of electrons backscattered by bulk gold and silicon samples

P. Gérard, J. L. Balladore, J. P. Martinez and A. Ouabbou
Scanning 17 (6) 377 (1995)
https://doi.org/10.1002/sca.4950170606

Proximity effects in electron beam lithography in SAL 601 resists on a Si-SiO2-Si substrate

A. Ouabbou, J.P. Martinez, F. Lalanne, P. Gérard and J.L. Balladore
Microelectronic Engineering 20 (4) 255 (1993)
https://doi.org/10.1016/0167-9317(93)90005-P