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Cited article:

Deposition of PZT Thin Films on Polymer Substrate by Means of Low Pressure Plasma Jet System

A. Deyneka, Z. Hubicka, L. Jastrabik, et al.
Ferroelectrics 316 (1) 157 (2005)
https://doi.org/10.1080/00150190590963291

Investigation of the RF pulse modulated plasma jet system during the deposition of Pb(ZrxTi1−x)O3 thin films on polymer substrates

Z. Hubička, M. Čada, P. Adámek, et al.
Surface and Coatings Technology 200 (1-4) 940 (2005)
https://doi.org/10.1016/j.surfcoat.2005.02.041

Correlation between structure, microstructure, and ferroelectric properties of PbZr[sub 0.2]Ti[sub 0.8]O[sub 3] integrated film: Influence of the sol-gel process and the substrate

Nicole Floquet, Jérôme Hector and Philippe Gaucher
Journal of Applied Physics 84 (7) 3815 (1998)
https://doi.org/10.1063/1.368560