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Cited article:

Etude physicochimique et structurale de nitrures et d'oxynitrures de silicium très minces formés par traitement thermique rapide

R. Saoudi, G. Hollinger, M. Pitaval, P. Molle

J. Phys. III France, 5 5 (1995) 557-573

DOI: https://doi.org/10.1051/jp3:1995146

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