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Cited article:

Hydrogen Diffusion and Trapping in Micro-Nanocrystalline Silicon

L. Lusson, P. Elkaim, A. Correia, D. Ballutaud

J. Phys. III France, 5 8 (1995) 1173-1184

DOI: https://doi.org/10.1051/jp3:1995184

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Perspectives, Science and Technologies for Novel Silicon on Insulator Devices

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SIMS study of deuterium distribution and thermal stability in ZMR SOI structures

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