Articles citing this article

The Citing articles tool gives a list of articles citing the current article.
The citing articles come from EDP Sciences database, as well as other publishers participating in CrossRef Cited-by Linking Program. You can set up your personal account to receive an email alert each time this article is cited by a new article (see the menu on the right-hand side of the abstract page).

Cited article:

Photoresist Development Model for Linewidth Control in the Fabrication of MCM and Customised ASICs

E. Saint-Christophe, H. Fremont, M. Fathi, Y. Danto

J. Phys. III France, 6 11 (1996) 1507-1526

DOI: https://doi.org/10.1051/jp3:1996199

PDF (815.3 KB)
References

This article has been cited by the following article(s):

Applications of a theoretical model for line width control in photoresists sensitised by a laser beam

E. Saint Christophe, H. Frémont, G. N'kaoua and Y. Danto
Electronics Letters 33 (12) 1049 (1997)
https://doi.org/10.1049/el:19970738