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Cited article:

Optical Diagnostics of RF Argon and Xenon Magnetron Discharges

M.F. Dony, F. Debal, M. Wautelet, J.P. Dauchot, M. Hecq, J. Bretagne, P. Leray, A. Ricard

J. Phys. III France, 7 9 (1997) 1869-1876

DOI: https://doi.org/10.1051/jp3:1997228

This article has been cited by the following article(s):

Diagnostic of a RF (13.56MHz) Magnetron in Ar/CH₄ Discharge

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Advanced Materials Research 227 195 (2011)
https://doi.org/10.4028/www.scientific.net/AMR.227.195

Comparative determination of the electron temperature in Ar- and N2-plasmas with electrostatic probes, optical emission spectroscopy OES and energy dispersive mass spectrometry EDMS

G. Crolly and H. Oechsner
The European Physical Journal Applied Physics 15 (1) 49 (2001)
https://doi.org/10.1051/epjap:2001166

Diagnostics by optical absorption of sputtered atom density in magnetron discharges

M. F. Dony, J. P. Dauchot, M. Wautelet, M. Hecq and A. Ricard
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 18 (3) 809 (2000)
https://doi.org/10.1116/1.582259

Correlation between in situ optical emission spectroscopy in a reactive Ar/O[sub 2] rf magnetron sputtering discharge and Pb(Zr[sub x]Ti[sub 1−x])O[sub 3] thin film composition

F. Ayguavives, B. Ea-kim, P. Aubert, B. Agius and J. Bretagne
Applied Physics Letters 73 (8) 1023 (1998)
https://doi.org/10.1063/1.122072