Journal de Physique III

Plasma depostion of BN, BCN:H and Me-BCN:H films using N-trimethylborazine (Me = Ti, Nb)

A. Weber, U. Bringmann, C.P. Klages, K. Taube, G. Döllein, H. Meyer and G. Weidenbach

J. Phys. III France, 2 8 (1992) 1391-1398

DOI: 10.1051/jp3:1992184

A. Weber

U. Bringmann

C.P. Klages

K. Taube

G. Döllein

H. Meyer

G. Weidenbach

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