Journal de Physique III

Plasma diagnostics of rf discharges used for the deposition of hydrogenated amorphous carbon coatings

J. Smeets, V. Van den Bergh, R. Jacobs, L. Eersels, J. Meneve and E. Dekempeneer

J. Phys. III France, 2 8 (1992) 1461-1468

DOI: 10.1051/jp3:1992191

J. Smeets

V. Van den Bergh

R. Jacobs

L. Eersels

J. Meneve

E. Dekempeneer

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