Journal de Physique III

Space and time resolved electric field vector distribution in radiofrequency discharges between unequal area electrodes

M. P. Alberta, H. Debontride, J. Derouard and N. Sadeghi

J. Phys. III France, 3 1 (1993) 105-124

DOI: 10.1051/jp3:1993118

M. P. Alberta

H. Debontride

J. Derouard

N. Sadeghi

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