Journal de Physique III

Gravure hélicon de l'InP en plasma HBr. Morphologie et caractérisation des défauts de surface

J. Etrillard, P. Ossart, G. Patriarche and J.M. Francou

J. Phys. III France, 5 5 (1995) 467-481

DOI: 10.1051/jp3:1995140

J. Etrillard

P. Ossart

G. Patriarche

J.M. Francou

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