Journal de Physique III

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Croissance de couches de Si$_{\mathsf{1}-x}$Ge$_{x}$ par réaction chimique a partir d'une phase gazeuse : étude thermodynamique et analyse du transfert de matière

H. Rouch, M. Pons, C. Bernard and R. Madar

J. Phys. III France, 5 6 (1995) 759-773

DOI: 10.1051/jp3:1995159

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