Journal de Physique III

Classical and Rapid Thermal Process Effects on Oxygen Precipitation in Silicon

K. Mahfoud, M. Loghmarti, J.C. Muller and P. Siffert

J. Phys. III France, 5 9 (1995) 1345-1351

DOI: 10.1051/jp3:1995194

K. Mahfoud

M. Loghmarti

J.C. Muller

P. Siffert

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