Journal de Physique III

Laser Beam Lithography for Direct Patterning of Interconnections on Prediffused ASIC's

A. Fleury, E. Saint-Christophe, H. Frémont, M. Fathi, G. N'Kaoua and Y. Danto

J. Phys. III France, 5 9 (1995) 1455-1467

DOI: 10.1051/jp3:1995203

A. Fleury

E. Saint-Christophe

H. Frémont

M. Fathi

G. N'Kaoua

Y. Danto

Articles written by ALL the selected authors (AND)

Articles written by ANY OF the selected authors (OR)