Journal de Physique III

A Simple Ion Flux Estimation in a Low Pressure R.F. Plasma (13.56 MHz)

I. Grenier, V. Massereau, A. Celerier and J. Machet

J. Phys. III France, 7 4 (1997) 937-950

DOI: 10.1051/jp3:1997166

I. Grenier

V. Massereau

A. Celerier

J. Machet

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