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Determination of the dissolution slowness surface by study of etched shapes I. Morphology of the dissolution slowness surface and theoretical etched shapes

T. Leblois, C. R. Tellier

J. Phys. III France, 2 7 (1992) 1259-1286

DOI: https://doi.org/10.1051/jp3:1992177

Citations de cet article :

Origin of the Mode-Splitting in a Microwave Sapphire Whispering-Gallery Mode Resonator

Vincent Giordano and Samuel Margueron
IEEE Transactions on Microwave Theory and Techniques 72 (7) 3947 (2024)
https://doi.org/10.1109/TMTT.2023.3347256

Etch pits on (hk0) and (hh${\sf \ell}$) silicon surfaces. Experimental shapes and simulations

C. R. Tellier
The European Physical Journal Applied Physics 47 (3) 30303 (2009)
https://doi.org/10.1051/epjap/2009111

Some investigations on doubly-rotated quartz resonant temperature sensors

T.G. Leblois and C.R. Tellier
Sensors and Actuators A: Physical 99 (3) 256 (2002)
https://doi.org/10.1016/S0924-4247(01)00796-8

Characterization of the anisotropic chemical attack of {hk0} silicon plates in a T.M.A.H. solution

A.R. Charbonnieras and C.R. Tellier
Sensors and Actuators A: Physical 77 (2) 81 (1999)
https://doi.org/10.1016/S0924-4247(99)00020-5

Chemical etching of Y-rotated quartz plates: experiments and theoretical approach

T. Leblois, C.R. Tellier and T. Messaoudi
Sensors and Actuators A: Physical 61 (1-3) 405 (1997)
https://doi.org/10.1016/S0924-4247(97)80297-X

Micromachining of (hhl) silicon structures: experiments and 3D simulation of etched shapes

C.R Tellier and S Durand
Sensors and Actuators A: Physical 60 (1-3) 168 (1997)
https://doi.org/10.1016/S0924-4247(96)01418-5

Anisotropic etching of silicon crystals in KOH solution

C. R. Tellier and A. Brahim-Bounab
Journal of Materials Science 29 (24) 6354 (1994)
https://doi.org/10.1007/BF00353993

Anisotropic etching of silicon crystals in KOH solution

C. R. Tellier and A. Brahim-Bounab
Journal of Materials Science 29 (22) 5953 (1994)
https://doi.org/10.1007/BF00366880