Journal de Physique III

Chemical Vapor Deposition of Thick Tungsten Coatings: Mass Transport Modelling and Experiments

M. Pons, A. Benezech, P. Huguet, R. Gaufres, Ph. Diez and D. Lafforet

J. Phys. III France, 5 8 (1995) 1145-1160

DOI: 10.1051/jp3:1995182

M. Pons

A. Benezech

P. Huguet

R. Gaufres

Ph. Diez

D. Lafforet

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