Journal de Physique III

Ground State and Excited State H-Atom Temperatures in a Microwave Plasma Diamond Deposition Reactor

A. Gicquel, M. Chenevier, Y. Breton, M. Petiau, J.P. Booth and K. Hassouni

J. Phys. III France, 6 9 (1996) 1167-1180

DOI: 10.1051/jp3:1996176

A. Gicquel

M. Chenevier

Y. Breton

M. Petiau

J.P. Booth

K. Hassouni

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