PIC/MC Modeling of an Ion Source: Case Study

(Received 8 January 1996, received in final form 20 May 1996, accepted 22 May 1996)

Abstract
Kinetic simulations on the basis of the PIC/MC code allow for the self-consistent kinetic simulation of gas discharges under conditions where other simulation methods fail. We present a case study of a low pressure asymmetric magnetized capacitively coupled RF discharge. The one-dimensional treatment of the system can be extended to model ion extraction in the axial direction from this discharge, thus simulating an ion source. We present results on the properties of the sheath and bulk regions, on the efficiency of the extraction, and on the dependence of the power balance of the discharge, the magnetic field and the wall material.