J. Phys. III France
Volume 3, Numéro 11, November 1993
Page(s) 2059 - 2063
DOI: 10.1051/jp3:1993253
J. Phys. III France 3 (1993) 2059-2063

Real-time optical monitoring of spin coating

F. Horowitz, E. Yeatman, E. Dawnay and A. Fardad

Department of Electrical and Electronic Engineering, Imperial College of Science, Technology and Medicine, London SW7 2BT, Great-Britain

(Received 29 June 1993, accepted 28 September 1993)

A novel application of optical interferometry, monitoring of spin coating, is shown to provide valuable information for the basic understanding of the process dynamics. This could increase the potential of spin coating for the production of films with required properties. Temporal evolution of spin-on glass films, in open air and saturated solvent atmospheres, is determined for 10-60 s spinning times.

Nous montrons qu'une nouvelle application de l'interférométrie optique, le contrôle du dépôt à la tournette, fournie des informations fondamentales pour la compréhension de la dynamique du dépôt. Cette compréhension pourrait nous permettre d'améliorer la production à la tournette de couches de caractéristiques précises. L'évolution temporelle du dépôt de couches de verre, aussi bien en atmosphère ouverte que saturée en solvant, est déterminée pour des durées de centrifugation variant de 10 à 60 s.

© Les Editions de Physique 1993

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