Journal de Physique III

Annealing-related electrical and piezoresistive properties of Band As-implanted LPCVD silicon films

P. Jeanjean, J. Sicart, J. L. Robert, M. Le Berre, P. Pinard and V. Conedera

J. Phys. III France, 3 1 (1993) 47-53

DOI: 10.1051/jp3:1993119

P. Jeanjean

J. Sicart

J. L. Robert

M. Le Berre

P. Pinard

V. Conedera

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