| Issue |
J. Phys. III France
Volume 6, Number 9, September 1996
|
|
|---|---|---|
| Page(s) | 1189 - 1204 | |
| DOI | https://doi.org/10.1051/jp3:1996178 | |
J. Phys. III France 6 (1996) 1189-1204
Time Resolved Diagnostics for Kinetic Studies in N 2/O 2 Pulsed rf Discharges
S. De Benedictis and G. DilecceCentro di Studio per la Chimica dei Plasmi C.N.R., c/o Dipartimento di Chimica Università di Bari, Via Orabona 4, 70126 Bari, Italy
(Received 7 February 1996, revised 5 April 1996, accepted 29 April 1996)
Abstract
Time resolved optical diagnostics have been applied to the study of energy transfers in N
2/O
2 pulsed radio-frequency discharge. N
2(A
and NO(X
) have been measured by Laser Induced Fluorescence, and NO-
band by Emission Spectroscopy. The analysis in discharge and post discharge as a function of O
2 percentage allows to guess the main mechanisms correlating the relaxation of these species in the post-discharge. NO-
bands in N
2/O
2 discharge are mainly excited by N
2(A) + NO(X) collisions. The decay rates of N
2(A) can be accounted for by O, NO and O
2 quenching. NO ground state density, measured by LIF, varies with O
2 percentages showing a bell shape profile with a broad maximum. Some EEDF measured by Langmuir probe under continuous discharge
conditions show that O
2 addition, even in few percents, strongly reduces the density of low energy electrons.
© Les Editions de Physique 1996