Journal de Physique III

Characterization of stress in semiconductor wafers using birefringence measurements

E. M. Gamarts, P. A. Dobromyslov, V. A. Krylov, S. V. Prisenko, E. A. Jakushenko and V. I. Safarov

J. Phys. III France, 3 5 (1993) 1033-1049

DOI: 10.1051/jp3:1993180

E. M. Gamarts

P. A. Dobromyslov

V. A. Krylov

S. V. Prisenko

E. A. Jakushenko

V. I. Safarov

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