| Numéro |
J. Phys. III France
Volume 4, Numéro 9, September 1994
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|---|---|---|
| Page(s) | 1649 - 1658 | |
| DOI | https://doi.org/10.1051/jp3:1994217 | |
DOI: 10.1051/jp3:1994217
J. Phys. III France 4 (1994) 1649-1658
1 Laboratory of X-ray Optics and Technology, Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, 142432, Chernogolovka, Moscow region, Russia
2 Faculté des Sciences de St Jérome, URA 843, Université d'Aix-Marseille III, avenue Escadrille Normandie-Niemen, 13397 Marseille Cedex 20, France
3 Laboratoire de Cristallographie, CNRS, 25 avenue des Martyrs, 166X 38042 Grenoble Cedex, France
© Les Editions de Physique 1994
J. Phys. III France 4 (1994) 1649-1658
Multilayer diffraction grating properties
A. Erko1, V. Martynov1, D. Roshchoupkin1, A. Yuakshin1, B. Vidal2, P. Vincent2 and M. Brunel31 Laboratory of X-ray Optics and Technology, Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, 142432, Chernogolovka, Moscow region, Russia
2 Faculté des Sciences de St Jérome, URA 843, Université d'Aix-Marseille III, avenue Escadrille Normandie-Niemen, 13397 Marseille Cedex 20, France
3 Laboratoire de Cristallographie, CNRS, 25 avenue des Martyrs, 166X 38042 Grenoble Cedex, France
(Received 19 November 1993, revised 12 April 1994, accepted 27 April 1994)
Abstract
In the paper the diffraction properties of multilayer static and dynamic gratings are discussed using reciprocal space and
dispersive surfaces representation. A strong dependence of the multilayer grating properties on the lamellar period and the
optical characteristics of multilayer grating materials are shown. Important points in the grating fabrication, computer simulation,
and tests also described.
© Les Editions de Physique 1994