Journal de Physique III

Obtention par PVD de condensateurs à base d'oxyde de germanium amorphe

C. Caperaa, B. Segda, M. Jacquet, G. Baud and J.-P. Besse

J. Phys. III France, 3 4 (1993) 775-791

DOI: 10.1051/jp3:1993163

C. Caperaa

B. Segda

M. Jacquet

G. Baud

J.-P. Besse

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