A Finite-Element / Boundary-Element Method for the Simulation of Coupled Electrostatic-Mechanical Systems

(Received 20 March 1996, revised 11 June 1997, accepted 7 july 1997)

Abstract
A recently developed modeling scheme for the numerical simulation of coupled electrostatic-mechanical systems such as electrostatic transducers is presented. The scheme allows the calculation of dynamic rigid motions as well as deformations of materials in an electric field. The coupled system, described by the equations governing the electric and mechanical field, is solved by a combined Finite-Element/Boundary-Element-Method (FEM-BEM). Computer simulations of a micropump and of an acceleration sensor are presented demonstrating the efficiency of the developed algorithm.