J. Phys. III France
Volume 2, Numéro 8, August 1992
Page(s) 1381 - 1389
DOI: 10.1051/jp3:1992179
J. Phys. III France 2 (1992) 1381-1389

CVD of BaF 2 with new stable and volatile complexes of barium(II)

D.G. Gilliland1, M.L. Hitchman1, S.C. Thompson2 and D.J. Cole-Hamilton2

1  Department of Pure and Applied Chemistry, University of Strathclyde, Glasgow G1 1XL, Scotland
2  Chemistry Department, University of St. Andrews, Fife KY16 9ST, Scotland

(Received 1st February, accepted 13 April 1992)

The new $\beta$-diketone, 1,1,1,2,2,3,3,7,7,8,8,9,9,9-tetradecafluorononane-4,6-dione (HTDFND) has been prepared and employed in the formation of a complex of Ba. A complex of the same metal derived from the $\beta$-diketone, 1,1,1,2,2,3,3,7,7,7,-decafluoroheptane-2,4-dione (HDFHD) has also been prepared. The compounds have the formula [ M(TDFND) 2H 2O] or [ M(DHFD) 2H 2O] . The complexes have been characterised by analytical and spectroscopic means. Simultaneous thermal analysis at one atmosphere reveals that the compounds lose water but then sublime, and in the case of [ Ba(TDFND) 2H 2O] without any decomposition. [ Ba(TDFND) 2H 2O] is the first barium complex for which this is the case and it can be dehydrated to give [ Ba(TDFND) 2] which is also volatile. This suggests that [ Ba(TDFND) 2H 2O] could be a suitable precursor for the CVD growth of BaF 2. This has been investigated. On silicon substrates complete orientation in the (111) direction is observed. Changes in the film growth rate with time are attributed to slow reorganisation of the crystal structure of [ Ba(TDFND) 2] .

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