Numéro |
J. Phys. III France
Volume 2, Numéro 8, August 1992
|
|
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Page(s) | 1399 - 1411 | |
DOI | https://doi.org/10.1051/jp3:1992104 |
DOI: 10.1051/jp3:1992104
J. Phys. III France 2 (1992) 1399-1411
BT Laboratories, Martlesham Heath, Ipswich, Suffolk IP5 7RE, U.K.
© Les Editions de Physique 1992
J. Phys. III France 2 (1992) 1399-1411
Safety and environmental aspects of CVD
Richard H. Walling and Rodney H. MossBT Laboratories, Martlesham Heath, Ipswich, Suffolk IP5 7RE, U.K.
(Received 1st February, accepted 15 April 1992)
Abstract
The use of toxic materials in many CVD processes means that careful attention to safety procedures in handling and using these
materials is essential. This paper addresses the safety aspects of the CVD process as a whole and then discusses two particular
areas in more detail. The possibility of using less hazardous materials in processes is considered and illustrated by recent
developments in MOCVD. Techniques for scrubbing waste gases from CVD effluent is also reviewed and some of the key issues
discussed.
© Les Editions de Physique 1992