J. Phys. III France
Volume 2, Numéro 8, August 1992
Page(s) 1399 - 1411
DOI: 10.1051/jp3:1992104
J. Phys. III France 2 (1992) 1399-1411

Safety and environmental aspects of CVD

Richard H. Walling and Rodney H. Moss

BT Laboratories, Martlesham Heath, Ipswich, Suffolk IP5 7RE, U.K.

(Received 1st February, accepted 15 April 1992)

The use of toxic materials in many CVD processes means that careful attention to safety procedures in handling and using these materials is essential. This paper addresses the safety aspects of the CVD process as a whole and then discusses two particular areas in more detail. The possibility of using less hazardous materials in processes is considered and illustrated by recent developments in MOCVD. Techniques for scrubbing waste gases from CVD effluent is also reviewed and some of the key issues discussed.

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